Thin nanocrystalline SiC sheets with various forms of conductivity have been shown to be capable of detecting oxidative (O2) and reducing gases (CO, CH4) at maximum permissible quantities for human safety. It was discovered that n-nc-SiC films with electronic conductivity had a higher gas sensitivity Sn to the action of gases over a wide concentration range than p-nc-SiC films with hole conductivity sensivity Sp. The sensitivity ratio of the films Sn / Sp was 2.9, 4.8, and 10 for the highest allowed concentrations of O2 (3%), CO (0.1%), and CH4 (10%), respectively. We used a basic resistor shape optimization technique for study, which allowed us to greatly boost the sensitivity of films to gases, allowing us to detect extremely low gas concentrations. As a result, high-temperature gas sensors based on nc-SiC films can detect reactive gases in a wide range of concentrations, including threshold allowed values.
Author(S) Details
A. V. Semenov
National Technical University “Kharkiv Polytechnic Institute” 2, Kyrpychova Str., Kharkiv, 61002, Ukraine.
D. V. Lubov
National Technical University “Kharkiv Polytechnic Institute” 2, Kyrpychova Str., Kharkiv, 61002, Ukraine.
A. A. Kozlovskyi
Institute for Single Crystals NAS of Ukraine, Nauky Ave. 60, Kharkiv, 61001, Ukraine.
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