Assessment of High Accuracy 3D Shape Analysis | Chapter 09 | Research Developments in Science and Technology Vol. 5

 When absorption or scattering is high, form measuring accuracy is roughly 100 wavelengths, but scatterometry can increase it to about a wavelength. Because scatterometry utilises a calculation approach that can strictly account for diffraction and polarisation, the computation time and memory requirements are much higher than for an approximation method that does not. As a result, utilising rigorous coupled wave analysis, a common scatterometry approach, we devised a high-speed simulation method with a minimal memory footprint. Soft X-ray scatterometry was used to measure the breadth of each cross section of a two-layer column in this research. The isolated scatterer in the vacuum system was exposed to scintillation radiation with a wavelength of 10 nm. In We have demonstrated that the resolution is at least a few wavelengths in our study.

Author(S) Details

Tetsuya Hoshino
Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, Japan.

Masahiko Shiono
Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, Japan.

Saswatee Banerjee
Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, Japan.

Sadao Aoki
Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, Japan.

Kenji Sakurai
National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki, 305-0051, Japan

Masahide Itoh
Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennoudai, Tsukuba 305-8577, Japan.

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