Study on Conversion Treatment of Thin Titanium Layer Deposited onto Carbon Steel: Application of Physical and Mechanical Investigation | Chapter 13 | Newest Updates in Physical Science Research Vol. 14

In recent years, it has been possible to use small and/or microscale versions of more conventional mass spectrometers. As a result, small analytical instruments for 'in the field' sensing applications in aerospace, environmental monitoring, medical diagnostics, and process control have been created. This chapter examines the concepts that guide the creation of small quadrupole mass spectrometers. Two alternative microfabrication technologies are compared to a traditional QMS for residual gas analysis in the range of 1-100 Da. Two fabrication methods for small QMS realisation are described, as well as the fundamental concepts of QMS operation. In recent years, it has been possible to use small and/or microscale versions of more conventional mass spectrometers. As a result, small analytical instruments for 'in the field' sensing applications in aerospace, environmental monitoring, medical diagnostics, and process control have been created. This chapter examines the concepts that guide the creation of small quadrupole mass spectrometers. Two alternative microfabrication technologies are compared to a traditional QMS for residual gas analysis in the range of 1-100 Da. Two fabrication methods for small QMS realisation are described, as well as the fundamental concepts of QMS operation.


Author (S) Details

Younès Benarioua
Département de Génie Mécanique, Faculté de Technologies, Université de M’sila, Route de Bordj Bou Arréridj - M'sila 28000, Algérie. Unité de Recherche Matériaux Emergents, Université de Sétif 1-19000, Algérie.


Bogdan Wendler
Institute of Materials Science and Engineering; Lodz University of Technology, 60- 924 Lodz, Poland


Didier Chicot
Univ. Lille, ULR 4515, Laboratoire de Génie Civil et géo-Environnement (LGCgE), Lille, F- 59000, France.


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