Remote Plasmas Chemical Vapour Deposition and Reactive Sputtering in Magnetron Plasmas | Chapter 11 | Plasmas Afterglows with N2 for Surface Treatments synthesis 2024

Boron trichloride (BCl₃) is frequently encountered in plasma surface engineering. Cerium and its compounds have attracted scientific interest as catalytic converters for the reduction of CO emissions in exhaust gases. Moreover, Cerium has been proven to reveal anti-corrosion properties. Two optical spectroscopy methods have been applied to the determination of B-atoms and Ce atom's absolute densities. A microwave discharge (2.45 GHz) of a surfaguide type is produced in a quartz tube (inner diameter 5 mm) either in Ar − BCl₃ gas mixture (process 1) or in pure argon (process 2). In process 2, an Ar − BCl₃ gas mixture was introduced downstream of the pure argon plasma. The first method on B-atoms was applied to a remote CVD Ar − BCl₃ microwave plasma.

 At the Ar − l. 5%BCl₃ plasma end, the B-atom density nearly reach 10¹⁵ cm⁻³, which corresponds to a BCl3 dissociation degree of about 30%. It was observed the reactions of B-atoms on O² desorbing from the tube wall after B-atoms collisions. The second optical spectroscopy is the resonant absorption applied to Ce - atoms produced in a DC magnetron sputtering of a Ce cathode. In pure Ar plasmas, the Ce density was 1.5 10⁸ cm⁻³. By introducing O² in the Ar plasma, it was observed a hysteresis effect of Ce density as for the plasma voltage.

 

Author (s) Details

André Ricard
LAPLACE, Université de Toulouse, CNRS, INPT, UPS, 118 route de Narbonne, 31062 Toulouse Cedex 9, France.

 

Thierry Belmonte
Institut Jean Lamour, Department of Physics and Chemistry of Solids and Surfaces, Nancy- Universite, CNRS, Parc de Saurupt, CS 14234, 54042 Nancy Cedex, France.

 

Thierry Czerwiec
Institut Jean Lamour, Department of Physics and Chemistry of Solids and Surfaces, Nancy- Universite, CNRS, Parc de Saurupt, CS 14234, 54042 Nancy Cedex, France.

 

Stephanos Konstantinidis
Plasma-Surface Interaction Chemistry, CIRMAP, Res. Inst. Materials Sc. and Eng., University of Mons, 25 Place du Parc, B-7000 Mons, Belgium.

 

Please see the book here:- https://doi.org/10.9734/bpi/mono/978-93-49473-93-5/CH11