Extremely thin diamond-like carbon (DLC) films are commonly used
for nanotribological applications as a protective film. Atomic-scale wear and
minute fluctuations in friction degrade equipment performance. Thus, improving
the nanotribology of these protective films is crucial for realising higher
reliability in nano-systems. The tribological properties of extremely thin DLC
films at high temperature were studied. The films were deposited on nickel
phosphorus (NiP) or Si substrates using filtered cathodic vacuum arc (FCVA) or
plasma chemical vapour deposition (P-CVD). The nanotribological properties of
the films were investigated using AFM. To evaluate how the friction durability
properties of the film depend on load, the friction coefficient was measured using
a load-increase and decrease type friction tester. Cluster analysis of the
dependence of the friction coefficient on load and number of reciprocating
cycles was performed on the data from the friction test using statistical
analysis. The nanoindentation hardness values and elastic moduli of the films
were lower on NiP than on Si. The nanofriction force of the FCVA-DLC film on
NiP was low at room temperature, but very high at high temperatures. In this
hard film, the lubricous adsorbate was removed by sliding at high temperature,
making it easily damaged through the large deformation of NiP. In contrast, the
friction force of the P-CVD-DLC films on both substrates was low at high
temperatures. In this case, the lubricous tribochemical products from the P-CVD-DLC
film reduced friction and wear. The friction map dependencies on load and
number of reciprocating cycles were evaluated using a friction test and
statistical cluster analysis. In contrast to the FCVA-DLC film, the friction
coefficient of the P-CVD-DLC film is relatively high at room temperature;
however, the friction coefficient decreases at high temperature, associated
with an increase in durability and critical load. The friction durability of
both films depended more strongly on load on NiP than on Si, with the friction
coefficients on Si being almost independent of load. At high temperatures and
loads, the durability of the FCVA-DLC film on NiP decreased, and this film was
easily damaged. Low friction and better durability at high temperature can be
obtained for this P-CVD-DLC film; this is evident in the superior nanofriction
and wear properties of the film at high temperature.
Author(s)
Details
Shojiro
Miyake
MS Laboratory, 3-1, Gonokami, Hamra-City, Tokyo 205-0011, Japan
and Nippon Institute of Technology, 4-1, Miyashito-Machi, Minamisaitama,
Saitama, 345-8501, Japan.
Masatoshi
Miyake
MS Laboratory, 3-1, Gonokami, Hamra-City, Tokyo 205-0011, Japan
and Nishogakusya University, 6-16, Sanbancho, Chiyoda-Ku, Tokyo 102-8336,
Japan.
Please see the book here:- https://doi.org/10.9734/bpi/psniad/v2/5877
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