several types of discharge structures (DC, RF, DBD, magnetron) at different gas pressures from a few mTorr to the atmospheric gas pressure. Pulsed DC plasmas were performed in N2 and N2 − H2 for steel cathode nitriding. Pulsed RF plasmas and afterglows have been studied in Ar and Ar-N2 with an experimental setup. Both Glow Dielectric Barrier Discharge and Townsend Dielectric Barrier Discharge discharges are homogeneous or diffuse DBDs, free of streamer and microdischarge, and convenient to active polymer It has discussed the effects of reactions between metastable atoms (ArM) and from molecules (N2, A) in long (10−3 s range) and short (10−6 s range) time afterglows in the excitations of Ar high radiative levels, N2(C, v = 1) level and NO∗, N2O∗ bands. Strong emissions of Ti+ and O-atoms when O2 was added to Ar in a short time (10−6 s range), low Ar pressure (10−3Torr) pulsed DC magnetron plasmas which were associated with hard TiO2 coatings.
Author
(s) Details
André
Ricard
LAPLACE, Université de Toulouse, CNRS, INPT, UPS, 118 route de
Narbonne, 31062 Toulouse Cedex 9, France.
Françoise
Massines
PROMES - CNRS, Rambla de la Thermodynamique, 66100 Perpignan,
France.
Stephanos
Konstantinidis
Plasma-Surface Interaction Chemistry, CIRMAP, Res. Inst. Materials
Sc. and Eng., University of Mons, 25 Place du Parc, B-7000 Mons, Belgium.
Please see the book here:- https://doi.org/10.9734/bpi/mono/978-93-49473-93-5/CH4
No comments:
Post a Comment