In this work, Mn-doped ZnO films obtained by sol-gel (SG)
and hydrothermal (HT) methods were prepared for possible optical and
piezoelectric applications. The amount of Mn dopant was 1, 2 and 5at% and the
films were deposited on glass and Si/SiO2/Ti/Pt substrates. The comparative
characterization of the films for their structure, morphology, optical and
piezoelectric properties was achieved. SG films exhibit equiaxed nanoparticles,
with diameters around 50 nm, while uniform 1D nanorods, sized about 30 nm diameter
and 200-300 nm length, were obtained for the films prepared by HT method. XRD
diffractograms reveal the presence of zincite phase, with an improvement in
crystallinity of the HT films, which present a stronger orientation along (002)
plane (c-axis). Spectroscopic ellipsometry shows that the films obtained by SG
are much thinner than the ones obtained by HT, and that the refractive index is
increasing with the percent of dopant. The maximum transmission is the highest
for the undoped ZnO film and decreases with Mn concentration, but remains over
78% in the visible range. The piezoelectric tests have shown for both SG and HT
derived films low d33 coefficient. The highest value of d33 is obtained for HT
film with 2at% dopant. Based on the
obtained results the research directions for the improvement of piezoelectric
properties could be outlined.
Author (s) Details
Maria
ZaharescuAuthor (s) Details
“Ilie Murgulescu” Institute of Physical Chemistry of the Romanian Academy, 202 Splaiul Independentei, 060021 Bucharest, Romania.
Susana Mihaiu
“Ilie Murgulescu” Institute of Physical Chemistry of the Romanian Academy, 202 Splaiul Independentei, 060021 Bucharest, Romania.
Cristina Maria Vladut
“Ilie Murgulescu” Institute of Physical Chemistry of the Romanian Academy, 202 Splaiul Independentei, 060021 Bucharest, Romania.
Ecaterina Tenea
“Ilie Murgulescu” Institute of Physical Chemistry of the Romanian Academy, 202 Splaiul Independentei, 060021 Bucharest, Romania.
José María Calderόn-Moreno
“Ilie Murgulescu” Institute of Physical Chemistry of the Romanian Academy, 202 Splaiul Independentei, 060021 Bucharest, Romania.
Mihai Anastasescu
“Ilie Murgulescu” Institute of Physical Chemistry of the Romanian Academy, 202 Splaiul Independentei, 060021 Bucharest, Romania.
Hermine Stroescu
“Ilie Murgulescu” Institute of Physical Chemistry of the Romanian Academy, 202 Splaiul Independentei, 060021 Bucharest, Romania.
Irina Atkinson
“Ilie Murgulescu” Institute of Physical Chemistry of the Romanian Academy, 202 Splaiul Independentei, 060021 Bucharest, Romania.
Nicoleta Apostol
NIMP-National Institute of Materials Physics, 405A Atomiștilor, 077125 Măgurele – Ilfov, Romania.
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