Microwave plasma sources are described from low Ar gas
pressure (< 1 Torr) to high gas pressures (> 10 Torr up to the
atmospheric gas pressure) in N2 and Ar. At low gas pressure, the plasma
diameter is over 1 cm, typically 2.6 cm and at high gas pressure, it needs
discharge tubes < 1cm, down to 0.1 cm. The microwave plasmas have been
studied from low to atmospheric gas pressure in rare gases (mainly Ar) and gas
mixtures containing N2. At low gas pressure, it is found the surface wave
plasmas, produced by patented launchers Surfatron and Surfaguide, which were
developed by Michel Moisan in the Plasmas Lab. of the Montreal Univ. in 1975
[1] (see note). At high gas pressure from a few Torr up to the atmospheric gas
pressure, the SW plasmas Surfatron at low power and Surfaguide at high power
are still operating. It is also given the results obtained by a resonant cavity
in N2 − xO2 with π₯ = 0−20%. It is presently
reported the detection of plasma active species obtained by optical
spectroscopy. The main used frequency was 2450 MHz. The plasma power could vary
from a few Watts (surfatron) up to a few 103 Watts (Surfaguide, resonant
cavity). The plasma can be produced in a static gas flow, mainly at low gas
pressure and up to several liters per minute (slpm) at high gas pressures. The
optical spectroscopy was set up first to obtain the spatial distribution of
radiative species, mainly in Ar gas at low gas pressure in the perspective to
characterize the SW plasmas. Then the radial distribution of Ar metastable
density was obtained by resonant optical absorption. At medium (a few Torr) up
to the atmospheric gas pressure, flowing HF plasmas (resonant cavity) and SW
plasmas were produced in gas mixtures with N2 to produce N -atoms
and other active species such as N2 metastable molecules and N2
+ions which are studied inside the plasma and in afterglow conditions. It
discusses the kinetics reactions relating the π2(π,π£),π2(π΄,π£′),π2(π΅,π£′),π2(πΆ,π£′),π2
+ (π,π£′)
and N2 + (π΅,π£′) interfering in the
radiative emissions of N2 (π΅,π£′),π2(πΆ,π£′)
and N2 +(π΅,π£′) states. At atmospheric
gas pressure, the plasmas are mainly in Ar dominant gas, easier to ionize. In
these conditions, the plasmas are characterized by the electron density and the
gas temperature which will be reported for specific microwave plasmas sources.
Depending on plasma parameters such as powers, flow rates and exit tube
diameters, the plasmas were more and less near the Local Thermodynamic
Equilibrium (LTE) as demonstrated in Montreal Univ., Lisbon IST and Cordoba
Univ. The conclusion was that the N2 excited states are mainly
produced from the N2 ground state by electron collisions in a resonant
microwave cavity. It was estimated that the LTE was nearly reached in a 100
Torr, 300-500 W N2 plasma in a quartz tube of i.d.10 mm. with
equality of vibrational and rotational temperatures.
Author
(s) Details
AndrΓ©
Ricard
LAPLACE, UniversitΓ© de Toulouse, CNRS, INPT, UPS, 118 route de
Narbonne, 31062 Toulouse Cedex 9, France.
Please see the book here:- https://doi.org/10.9734/bpi/mono/978-93-49473-93-5/CH3